向各位大佬求助两篇论文，谢谢。
1.Reduction of batwing effect in white light interferometry for measurement of patterned sapphire substrates (PSS) wafer
原文链接：https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9960/1/Reduction-of-batwing-effect-in-white-light-interferometry-for-measurement/10.1117/12.2236874.short?SSO=1
2.Accurate submicron edge detection using the phase change of a nano-scale shifting laser spot
原文链接：https://www.sciencedirect.com/science/article/abs/pii/S0030399216307915
发表于 2022-3-7 15:19
发表于 2022-3-7 15:40
